The electron beam of a scanning electron microscope was used to write a polarisation grating onto vertical surface emitting lasers in a maskless, dry, single step process.
Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry
Ivo Utke, Martin G. Jenke, Christian Röling, Peter H. Thiesen, Vladimir Iakovlev, Alexei Sirbu, Alexandru Mereuta, Andrei Caliman and Eli Kapon
Nanoscale, 2011, DOI: 10.1039/C1NR10047E
