Read this ‘HOT’ Nanoscale Review which discusses the use of atomic layer deposition to nanoengineer photovoltaics:
Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition
Jonathan R. Bakke, Katie L. Pickrahn, Thomas P. Brennan and Stacey F. Bent
Nanoscale, 2011, DOI: 10.1039/C1NR10349K
Primary uses of atomic layer deposition for PV include formation of absorbing QDs at low cycle number (left), coatings on nanostructured substrates (middle), and growth of thin films (right).